Dr. Samir Chaudhry - Director, Design Enablement at TowerJazz
As the director of the modeling and characterization group for the TowerJazz, my team is tasked to deliver compact models for active and passive devices ranging in voltage from mV to 700V, and in frequency ranging from DC to 100GHz. We have found that a wide variety of instrumentation is essential in enabling us to deliver accurate models, and as such we have invested heavily in building up our lab:
On the design environment front, we validate our PDKs with Cadence’s analog design environment. Mentor’s Calibre is our sign-off design rule checking tool for customer tape-ins. We are also part of the iPDK alliance that is enabling common standards for foundry PDK development.
We mainly use Agilent’s IC-CAP for compact model extraction. Over the years we have built our own model extraction capabilities for models such as BSIM, PSP, and MM20 for MOSFET devices. For SiGe NPNs compact model extraction, we have relied on XMOD Technologies’ HiCUM toolkit add-on for IC-CAP. In addition, we extensively use “home-brew” Matlab scripts to automate our de-embedding and model extraction techniques for passive devices such as inductors and varactors.
Actually, it was my Ph.D. advisor Dr. Mark Law at the University of Florida, who helped me with Finite-element simulations that were being used to analyze wafer-bow measurements, which consistently showed a convex wafer bow when p-epi structures were grown on p+ starting material. The simulations were getting the magnitude of the bow correct, but predicted a concave bow. After over eight weeks of analysis, we discovered that there were two equally stable “lowest-energy” system states; one convex and one concave (think of metallic plate that can be “popped” up or down and remains in that state). If a slightly convex initial condition was provided to the simulation system, the simulations would converge correctly to the correct convex wafer-bow. I am convinced that I would have graduated eight weeks earlier, had the simple solution to the vexing problem been discovered earlier.
Topgrading by Bradford Smart. This is a primer on how best to invest in Human Capital, beginning with hiring the right person and then developing the talent. As a manager, I have found it extremely useful in building a team that is truly outstanding.
I owe this to Robert Milkovits, TowerJazz’s PDK architect. IC designers using the Cadence Analog Design Environment can save significant time and effort by using the inherited connections flow. Several foundry design kits support this flow (instead of implicit node definitions via CDF parameters) for bulk domain definition. Inherited connections offer several advantages as part of hierarchical, multi domain, and mixed-signal design. When inherited connections are used, the default bulk node is predefined (e.g. “sub” or “pwell” for devices that sit over P-substrate and “vdd” for devices over nwell). If a custom node (e.g. “pll_sub”) needs to be defined for a device, follow these guidelines:
I really enjoyed working on monte-carlo statistical modeling for SiGe BiCMOS technologies. The unique correlations between process parameters and the device electrical parameters required developing 1st principles based mapping equations. The statistical data from the fab gave unique insights on device behavior. As an example, the correlation between the CMOS device and poly-resistors allowed me to separate the channel-length variation for MOSFET between the perturbations of the physical gate length and source/drain lateral doping. It was gratifying to release a model that showed a good match between what was simulated and what our fab was actually producing.
When I was working on my PhD, all the graduate students were strictly instructed by our campus fab supervisor to never to leave the clean-room furnace unattended. While working on anneal experiments, I often found myself working late into the night. One night, while working with the furnace, I realized that I needed to use the restroom urgently. Unfortunately, no one else was in the lab, so I felt compelled not to leave the furnace unattended even though I had been working almost non stop for 12 hours. The next day, our supervisor overheard me talking with my colleagues who were very amused by my plight. He gruffly ordered me to meet with him. I was so worried that something had happened to the furnace. Out of earshot of my colleagues, the supervisor gently explained to me that it was okay to leave the lab unattended for a few minutes to answer the call of nature. He also told me that he was very impressed with my dedication to following the protocols. I learned a valuable lesson that day – that bathroom breaks are as essential to good research as expensive equipment!
We are expanding our statistical loop closure work. Essentially, this involves using an expanded set of process-control-monitoring statistical data and evaluating the correlations between various classes of devices. As an example, the poly-cd impacts both the MOSFETs and the poly-resistors. We are building on the Backward Propagation of Variance (BPV) work [1] done by Collin McAndrew at Freescale, to accurately separate out the various components of channel length variations in the MOSFET: poly-cd and source/drain implant related. With a careful and correct formulation, this technique has allowed us to not only accurately capture the spread in electrical parameters, but also model the correlations between the electrical behaviors across devices. Both these are essential in generating accurate monte-carlo statistical models.
The Foundry space is split into two dominant segments: the Digital Foundry and the Specialty Foundry. The Digital Foundry leverages a large capital investment into relatively standardized technology that serves a large set of customers in a uniform way and is primarily focused on scaling CMOS. This segment of the industry will experience steady growth. The Specialty Foundry (such as my employer, TowerJazz) leverages engineering service together with a more modest capital investment to serve smaller but more custom markets such as those of RF, analog, and power. This segment of the industry will continue to carve a bigger niche for itself, leveraging device innovations at more mature CMOS nodes. Specialty foundries will continue to see significant design activity at the 130, 180 and even the 350nm process technology nodes.
Efficient inventory management by IC manufacturers and the corresponding capacity management by foundries will be critical for the semiconductor industry. As has always been the case, investing wisely in process technology and capacity will separate the leaders from the followers.